6137158.pdf (3.16 MB)
Supplementary document for Label-free neural networks-based inverse lithography technology - 6137158.pdf
Version 2 2022-12-02, 19:16
Version 1 2022-11-30, 16:10
journal contribution
posted on 2022-12-02, 19:16 authored by jing chen, Yuan-Yuan Zhao, Yang Zhang, Jianxin Zhu, xuan-ming duanSupplemental Document
