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oe-3-7-280-m003.MOV (1.38 MB)

Media 3: Energy flow in light-coupling masks for lensless optical lithography

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posted on 1998-09-28, 00:00 authored by Olivier J. F. Martin, Nicolas B. Piller, Heinz Schmid, Hans Biebuyck, Bruno Michel
Originally published in Optics Express on 28 September 1998 (oe-3-7-280)

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    Optics Express

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    medialenslesflow28 September 1998Optics Expresslithographylight-coupling masksoe

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