Advancing large-scale thin-film PPLN nonlinear photonics with segmented tunable micro-heaters

Thin-film periodically poled lithium niobate (TF-PPLN) devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications. However, the patterning and poling of TF-PPLN devices today are mostly performed at chip scales, presenting a significant bottleneck for future large-scale nonlinear photonic systems that require the integration of multiple nonlinear components with consistent performance and low cost. Here, we take a pivotal step towards this goal by developing a wafer-scale TF-PPLN nonlinear photonic platform, leveraging ultraviolet stepper lithography and an automated poling process. To address the inhomogeneous broadening of the quasiphase matching (QPM) spectrum induced by film thickness variations across the wafer, we propose and demonstrate segmented thermal optic tuning modules that can precisely adjust and align the QPM peak wavelengths in each section. Using the segmented micro-heaters, we show the successful realignment of inhomogeneously broadened multi-peak QPM spectra with more than doubled peak second-harmonic generation efficiency. The advanced fabrication techniques and segmented tuning architectures presented herein pave the way for wafer-scale integration of complex functional nonlinear photonic circuits with applications in quantum information processing, precision sensing and metrology, and low-noise-figure optical signal amplification.