At-Focus Scanning Ptychography for High Resolution Imaging with a Wide Field of View
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From manufacturing to medicine, there is a demand for high resolution imaging over a large field of view. Here we present at-focus scanning ptychography (AFSP), a novel ptychographic metrology station designed for high resolution imaging over a large field of view. AFSP builds on scanning ptychography, but samples remain stationary during the imaging process, allowing for in-situ imaging. We demonstrate a resolution of 44.19μm, present images of spherical and freeform optics with a FOV of over 4cm, and validate the fidelity of the AFSP system by comparing it to established commercial instruments.
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Ivanic, Bojana; Barolak, Jonathan; Car, Christopher; Clarke, Cameron; Goldberger, David; Goeckeritz, Jeremy; et al. (2024). At-Focus Scanning Ptychography for High Resolution Imaging with a Wide Field of View. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.7016220.v2