Integration of microlenses on surface-micromachined optical ultrasound transducer array to improve detection sensitivity for parallel data readout

Posted on 2023-01-24 - 21:59
This letter reports the integration of micro lenses (MLs) on surface-micromachined optical ultrasound transducer (SMOUT) array to enable parallel ultrasound data readout. The MLs are fabricated by photoresist patterning and reflow, whose focal length are optimized with parametric studies. Experiments are conducted to characterize the acoustic responsivity and its uniformity of the SMOUT-ML elements under different conditions. The temporal stability of the SMOUT-ML elements immersed in water is assessed by monitoring their acoustic response for one week. Parallel ultrasound signal readout is simulated with a small group of SMOUT-ML elements. Experimental results show that high acoustic sensitivity and excellent long-term stability can be achieved by the ML-integrated SMOUT array, which could provide a promising approach for enabling parallel ultrasound data acquisition for high-speed 3D acoustic tomography.

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Yan, Zhiyu; Zou, Jun (2023): Integration of microlenses on surface-micromachined optical ultrasound transducer array to improve detection sensitivity for parallel data readout. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.6377022.v2
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