Modeling a grating coupler-based
interferometer for far-field-sensing of nanoscale displacements
Version 2 2021-04-28, 00:17Version 2 2021-04-28, 00:17
Version 1 2021-04-28, 00:16Version 1 2021-04-28, 00:16
Posted on 2021-04-28 - 00:16
Sensing displacements at the nanoscale is the basis for many metrology applications, in
particular atomic-force microscopy. Displacement sensing with nano-optomechanical structures
provides interesting opportunities for integration, but it typically features a small dynamic range
due to the near-field nature of the sensor-sample interaction. Here, a far-field sensing approach
based on a grating coupler is considered and an analytical model used to tune its performance is
introduced. The proposed model allows exploiting the full range of design parameters and thereby
optimizing resolution and dynamic range. The compact size of the sensor and the possibility
of integrating it with an on-chip laser and detector make it very promising for fully-integrated
optical sensing systems.
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Galeotti, Federico; Fiore, Andrea (2021). Modeling a grating coupler-based
interferometer for far-field-sensing of nanoscale displacements. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.5183672.v1