Multi-view object topography measurement with
optical sectioning structured illumination microscopy
Posted on 2019-08-05 - 17:17
Various optical instruments have been developed for three-dimensional (3D) surface topography, including the white light
interference, reflectance confocal, and digital holographic microscopes, etc. However, the steep local slope of objects may
cause the light to be reflected in a way that it will not be captured by the objective lens because of the finite collection angle
of the objective. To solve this “shadow problem”, we report a method to enlarge the collection angle range of optical
sectioning structured illumination microscopy by capturing sectioned images of the objects from multiple angle-of-views.
We develop a multi-view image fusion algorithm to reconstruct a single 3D image. Using this method, we detect previously
invisible details whose slopes are beyond the collection angle of the objective. The proposed approach is useful for height
map measurement and quantitative analyses in a variety of fields, such as biology, materials science, microelectronics, etc.
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Ren, Feifei; Wang, ZhaoJun; Qian, Jia; Liang, Yansheng; Dang, Shipei; Cai, YaNan; et al. (2019). Multi-view object topography measurement with
optical sectioning structured illumination microscopy. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.4452758.v1
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AUTHORS (9)
FR
Feifei Ren
ZW
ZhaoJun Wang
JQ
Jia Qian
YL
Yansheng Liang
SD
Shipei Dang
YC
YaNan Cai
PB
Piero Bianco
BY
Baoli Yao
ML
Ming Lei